Vertical MEMS Integration
MEMS Core Technologies top

Electrostatic actuation

This refers to high-density device configuration technology to integrate otherwise segregated components and integrated circuits on the surface of a PCB or chip. Micro actuators must be integrated with sensors and logic circuits to maximize their function to drive minute mechanical parts. High-density integration enables autonomous control by allowing sensors to detect the required information and logic circuits to process it.

Two elemental technologies for vertical integrated MEMS are required