Product Details Portlet

D6F-PH MEMS Differential Pressure Sensor

A Compact, High-accuracy Differential Pressure Sensor with Superior Resistance to Environments.

  • High accuracy of ±3%RD
  • Linearized and temperature compensated
  • Digital output (I2C communication) 
  • High flow impedance to reduce the influence of bypass configuration
  • Lineup of 4 types of slave address models

RoHS Compliant
Note: This web page provides an excerpt from a datasheet. Refer to Product Datasheet and other applicable documents for more information.
Applicable fluid (See note 1.)
Measurement range(See note 3.)
slave address (7 bit)
Air (See note 2.)0 to 250 Pa0b110_1100, 0x6CD6F-PH0025AD1
0b110_1101, 0x6DD6F-PH0025AD1-1
0b110_1110, 0x6ED6F-PH0025AD1-2
0b110_1111, 0x6FD6F-PH0025AD1-3
-50 to 50 Pa0b110_1100, 0x6CD6F-PH0505AD3
0b110_1101, 0x6DD6F-PH0505AD3-1
0b110_1110, 0x6ED6F-PH0505AD3-2
0b110_1111, 0x6FD6F-PH0505AD3-3
-500 to 500 Pa0b110_1100, 0x6CD6F-PH5050AD3
0b110_1101, 0x6DD6F-PH5050AD3-1
0b110_1110, 0x6ED6F-PH5050AD3-2
0b110_1111, 0x6FD6F-PH5050AD3-3
Note: 1. The Sensor be calibrated for different gas types. Consult your Omron representative.
Note: 2. Dry gas must not contain large particles, e.g., dust, oil, or mist.
Note: 3. At standard atmospheric pressure (1013.25 hPa)

Measurement range (See note 1)0 to 250 Pa±50 Pa±500 Pa
Calibration Gas (See note 2.)Air
Port TypeBamboo joint, Maximum outside diameter: 4.9 mm, minimum outside diameter: 4.0 mm
Power Supply2.3 to 3.6 VDC
Current Consumption6 mA max.
with no load and Vcc of 3.3 VDC, GND=0VDC, 25 °C
Resolution12 bit
Zero point tolerance (See note 3.)±0.2 Pa
Span tolerance (See note 3.)±3 %R.D.
Span shift due to temperature variation< 0.5% R.D. per 10°C
Response time33 ms typical at12 bit resolution (50 ms maximum)
The processing time is 6 ms typical at 12 bit resolution.
Gas flow through sensor (See note 5.)63 mL/min23 mL/min100 mL/min
Case materialPPS
Degree of ProtectionIEC IP40 (Excluding tubing sections.)
Withstand Pressure10 kPa
Operating temperature (See note 4.)−20 to +80 °C
Operating humidity (See note 4.)35 to 85 %RH
Storage temperature (See note 4.)−40 to +80 °C
Storage humidity (See note 4.)35 to 85 %RH
Insulation ResistanceBetween Sensor outer cover and lead terminals:
20 MΩ min. (at 500 VDC)
Dielectric StrengthBetween Sensor outer cover and lead terminals:
500 VAC, 50/60 Hz min. for 1 min
(leakage current: 1 mA max.)
Weight5.2 g
Note: 1. At standard atmospheric pressure (1013.25 hPa)
Note: 2. Dry gas must not contain large particles, e.g., dust, oil, or mist.
Note: 3. The zero point tolerance and span tolerance are independent uncertainties and add according to the principles of error propagation.
Note: 4. With no condensation or icing.
Note: 5. Type D6F-PH is based on thermal flow principle. Air flow is needed to measure the differential pressure.
Typical characteristic of air flow by differential pressure is below.
(Unit :mm)

Precautions for Correct Use

Sensor Applications

The D6F is built for use with general-purpose devices. In particular, when using the D6F for applications with the safety requirements described below, take steps to ensure system and device safety through measures such as fail-safe designs, redundant designs, and regular inspections.
•Safety devices for ensuring safety for persons
•Transportation equipment control (such as applications to stop operation)
•Aviation and space equipment
•Nuclear power equipment
Do not use the D6F for applications in which D6F operation would directly affect human life.

Fluids, Pipe Mounting and Sensor Installation

All D6F Models
(1) Use clean fluids. Install a filter or mist separator on the inflow pipe. Failure to do so may result in malfunction or changes in characteristics due to dust or mist. This does not apply to the D6F-W, D6F-V, D6F-P and D6F-PH.
(2) Do not use corrosive gases other than the specified applicable fluids (such as chlorine, sulfur, acid,or alkali) . Doing so may cause product failure.
(3) The specified performance may not be obtained if the D6F is used for fluids other than the specified applicable fluids.
(4) After removing the Sensor from the package, do not allow foreign particles to enter the piping. Foreign particles in the piping may cause product failure.
(5) Install the Sensor so that the fluid flows in the direction indicated by the arrow on the Sensor. Correct measurements cannot be obtained if the fluid flows in the wrong direction. This does not apply to the D6F-V, D6F-P and D6F-PH.
(6) It is recommended that the Sensor (except for the D6F-A3) be mounted horizontally. If it is not mounted horizontally, an error of ±1% FS or higher may result.
(7) Install the Sensor on a flat surface. Incorrect installation may damage the Sensor and make it impossible to obtain correct measurements.
(8) Make sure that the power to all equipment is turned OFF before you install the Sensor. Installing the Sensor while the power supply is ON may result in electrical shock or abnormal operation.
(9) Always check operation after installation.
(10) Do not drop the Sensor or disassemble the cover.

(1) Depending on the ambient environment and installation location, dust, dirt, and other foreign matter may come in inside the Sensor and block a part or all of the flow path or accumulate on internal components. This may result in the Sensor not being able to perform to the specifications given above. Always perform a pre-evaluation on your actual equipment and be aware of the possible problems that may occur before you use the Sensor with the actual equipment.
(2) Attach all tubes so that the fluid flows only in the direction from the high pressure side (+) to the low pressure side (-).
(3) Use M1.8 panhead screws or equivalent tapping screws to mount the Sensor, and tighten the screws to a maximum torque of 0.36 N•m.
(4) The sensor output is affected with the length of a tube. The error is less than 1% with a tube (ID:4mm) length up to 800mm.
(5) Connection
•Wire with the correct terminal names and polarities. Incorrect wiring will cause failure of internal components.
•Do not use flow soldering.
•Please solder after fixed on the circuit board by screw.
•Use a soldering iron:
Soldering condition Pressure Max.100gf
Temperature 350 degree C
Time Max. 5s

Operating Environment

Do not use the Sensor in the following locations:
•Locations directly subject to heat radiated from heating equipment
•Locations subject to water or oil
•Locations subject to direct sunlight
•Locations subject to intense temperature changes
•Locations subject to icing or condensation
•Locations subject to excessive vibration or shock

Countermeasures against Noise

Noise may make it impossible to obtain correct measurements.
Consider the following countermeasures.
•Allow as much space as possible between the Sensor and devices that generates high frequencies (such as high-frequency welders and high-frequency sewing machines) or surges.
•Attach surge absorbers or noise filters to noise-generating devices that are near the Sensor (in particular, equipment with inductance, such as motors, transformers, solenoids, and magnetic coils).
(It also helps to separate pipes and ducts, and to use shielded cables.)

Power Supply

•Force of connector terminal is 20 N max. Do not add strength more than tension of wire bending to connector at wiring. Install the connector coaxially to the fitting axis with holding all wires. And pulling angle should be within 15 degrees.
•Use the applicable connectors. Directly soldering the connection terminals will cause product failure. (except for the D6F-PH)
•Check the terminal names and polarity and wire the power supply correctly. Incorrect wiring will cause failure of internal components.
•When using a commercially available switching regulator, ground
the FG (frame ground) and G (ground) terminals.


The sensor is a precision device, and if large shock and load is applied, it may cause a failure or characteristic change. Please do not use the sensor which is added excessive shock to the terminals, discompose the cover, or has fallen.
•The sensor shall only be handled in electrostatic discharge protected areas (EPA) under protected and controlled conditions

RoHS Directive

The RoHS mark is displayed on the packing of products for which the six substances banned by the RoHS Directive have been abolished (both in processing and in the electronic components mounted to the PCBs).
* RoHS marking may be terminated if it is later determined that parts that were previously treated as RoHS compliant are not compliant due to circumstances at the supplier of the parts.

RoHS Compliance Criteria

The following standards are used to determine RoHS compliance for the six banned substances.
(Items to which the RoHS Directive is not applicable are not given.)
•Lead: 1,000 ppm max.
•Hexavalent chromium: 1,000 ppm max.
•Mercury: 1,000 ppm max.
•PBB: 1,000 ppm max.
•Cadmium: 100 ppm max.
•PBDE: 1,000 ppm max.