Product Details Portlet

D6F-PH MEMS Differential Pressure Sensor

A Compact, High-Acuracy Differential Pressure Sensor with Superior Resistance to Environments.

  • High accuracy of ±3%RD
  • Linearized and temperature compensated
  • Digital output (I2C communication)
  • High flow impedance to reduce the influence of bypass configuration
  • Manifold and Connector type is available 
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RoHS Compliant
Model 2D/3D CAD
D6F-PH0025AD1 Download
D6F-PH0025AD2 Download
D6F-PH0025AMD2 Download
D6F-PH0505AD3 Download
D6F-PH0505AD4 Download
D6F-PH0505AMD4 Download
D6F-PH5050AD3 Download
D6F-PH5050AD4 Download
D6F-PH5050AMD4 Download
Note: This web page provides an excerpt from a datasheet. Refer to Product Datasheet and other applicable documents for more information.

Ordering Information

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Applicable fluid
(See note 1.)
Differential pressure range
(See note 3.)
Flow Port Type
Connection
Model
Air
(See note 2.)
0 to 250 Pa Bamboo joint Lead terminals D6F-PH0025AD1
Connector D6F-PH0025AD2
Manifold Connector D6F-PH0025AMD2
±50 Pa Bamboo joint Lead terminals D6F-PH0505AD3
Connector D6F-PH0505AD4
Manifold Connector D6F-PH0505AMD4
±500 Pa Bamboo joint Lead terminals D6F-PH5050AD3
Connector D6F-PH5050AD4
Manifold Connector D6F-PH5050AMD4
Accessory (Sold separately)
Type Model
Cable D6F-CABLE3

Ratings / Characteristics

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Model D6F-PH0025AD1 D6F-PH0025AD2 D6F-PH0025AMD2 D6F-PH0505AD3 D6F-PH0505AD4 D6F-PH0505AMD4 D6F-PH5050AD3 D6F-PH5050AD4 D6F-PH5050AMD4
Differential pressure range
(See note 1)
0 to 250 Pa ±50 Pa ±500 Pa
Calibration Gas
(See note 2.)
Air
Port Type Bamboo joint
Maximum outside diameter: 4.9 mm, minimum outside diameter: 4.0 mm
Manifold Bamboo joint
Maximum outside diameter: 4.9 mm, minimum outside diameter: 4.0 mm
Manifold Bamboo joint
Maximum outside diameter: 4.9 mm, minimum outside diameter: 4.0 mm
Manifold
Electrical Connection Lead
terminals
Four-pin
connector
Four-pin
connector
Lead
terminals
Four-pin
connector
Four-pin
connector
Lead
terminals
Four-pin
connector
Four-pin
connector
Power Supply 2.3 to 3.6 VDC
Current Consumption 6 mA max. with no load and Vcc of 3.3 VDC, GND = 0 VDC, 25°C
Resolution 12 bit
Zero point tolerance
(See note 3.)
±0.2 Pa
Span tolerance
(See note 3.)
±3% RD
Span shift due to temperature variation < 0.5% RD per 10°C
Response time 33 ms typical at 12 bit resolution (50 ms max.)
The processing time is 6 ms typical at 12 bit resolution.
Gas flow through sensor
(See note 5.)
63 mL/min 23 mL/min 100 mL/min
Interface I2C
Case material PPS
Degree of Protection IEC IP40 (Excluding tubing sections.)
Withstand Pressure 10k Pa
Operating temperature
(See note 4.)
-20 to +80°C
Operating humidity
(See note 4.)
35 to 85 %RH
Storage temperature
(See note 4.)
-40 to +80°C
Storage humidity
(See note 4.)
35 to 85 %RH
Insulation Resistance Between sensor outer cover and lead terminals: 20 MΩ min. (at 500 VDC)
Dielectric Strength Between sensor outer cover and lead terminals: 500 VAC, 50/60 Hz min. for 1 min (leakage current: 1 mA max.)
Weight 5.0 g 5.0 g 5.4 g 5.0 g 5.0 g 5.4 g 5.0 g 5.0 g 5.4 g
Relation between pressure and flow rate
Relation between pressure and flow rate

Dimensions

(Unit: mm)

● Lead Terminals

D6F-PH0025AD1
D6F-PH0505AD3
D6F-PH5050AD3
D6F-PH0025AD1, D6F-PH0505AD3, D6F-PH5050AD3

● Connectors

D6F-PH0025AD2
D6F-PH0505AD4
D6F-PH5050AD4
D6F-PH0025AD2, D6F-PH0505AD4, D6F-PH5050AD4
D6F-PH0025AMD2
D6F-PH0505AMD4
D6F-PH5050AMD4
D6F-PH0025AMD2, D6F-PH0505AMD4, D6F-PH5050AMD4

Precautions

Precautions for Correct Use

● Sensor Applications

The D6F is built for use with general-purpose devices. In particular, when using the D6F for applications with the safety requirements described below, take steps to ensure system and device safety through measures such as fail-safe designs, redundant designs, and regular inspections.
•Safety devices for ensuring safety for persons
•Transportation equipment control (such as applications to stop operation)
•Aviation and space equipment
•Nuclear power equipment
Do not use the D6F for applications in which D6F operation would directly affect human life.

● Fluids, Pipe Mounting and Sensor Installation
All D6F Models

(1) Use clean fluids. Install a filter or mist separator on the inflow pipe. Failure to do so may result in malfunction or changes in characteristics due to dust or mist. This does not apply to the D6F-W, D6F-V, D6F-P and D6F-PH.
(2) Do not use corrosive gases other than the specified applicable fluids (such as chlorine, sulfur, acid,or alkali) . Doing so may cause product failure.
(3) The specified performance may not be obtained if the D6F is used for fluids other than the specified applicable fluids.
(4) After removing the Sensor from the package, do not allow foreign particles to enter the piping. Foreign particles in the piping may cause product failure.
(5) Install the sensor so that the fluid flows in the direction indicated by the arrow on the Sensor. Correct measurements cannot be obtained if the fluid flows in the wrong direction. This does not apply to the D6F-V, D6F-P and D6F-PH.
(6) It is recommended that the Sensor (except for the D6F-A3) be mounted horizontally. If it is not mounted horizontally, an error of ±1% FS or higher may result.
(7) Install the Sensor on a flat surface. Incorrect installation may damage the Sensor and make it impossible to obtain correct measurements.
(8) Make sure that the power to all equipment is turned OFF before you install the Sensor. Installing the Sensor while the power supply is ON may result in electrical shock or abnormal operation.
(9) Always check operation after installation.
(10) Do not drop the Sensor or disassemble the cover.

D6F-PHAD1/-PHAD2/-PHAD3/-PHAD4

(1) Depending on the ambient environment and installation location, dust, dirt, and other foreign matter may come in inside the Sensor and block a part or all of the flow path or accumulate on internal components. This may result in the Sensor not being able to perform to the specifications given above. Always perform a pre-evaluation on your actual equipment and be aware of the possible problems that may occur before you use the Sensor with the actual equipment.
(2) Attach all tubes so that the fluid flows only in the direction from the high pressure side (+) to the low pressure side (-).
(3) Use M1.8 panhead screws or equivalent tapping screws to mount the Sensor, and tighten the screws to a maximum torque of 0.36 N•m.
(4) The sensor output is affected with the length of a tube. The error is less than 1% with a tube (ID:4mm) length up to 800mm.
(5) Connection (D6F-PHAD1/-PHAD3)
•Wire with the correct terminal names and polarities. Incorrect wiring will cause failure of internal components.
•Do not use flow soldering.
•Please solder after fixed on the circuit board by screw.
•Use a soldering iron:
Soldering condition Pressure Max.100gf
Temperature 350 degree C
Time Max. 5s

D6F-PHAMD2/-PHAMD4

(1) Depending on the ambient environment and installation location, dust, dirt, and other foreign matter may come in inside the Sensor and block a part or all of the flow path or accumulate on internal components. This may result in the Sensor not being able to perform to the specifications given above. Always perform a pre-evaluation on your actual equipment and be aware of the possible problems that may occur before you use the Sensor with the actual equipment.
(2) Attach all tubes so that the fluid flows only in the direction from the high pressure side (+) to the low pressure side (-).
(3) Use M3 screws (round head screws) to install the Sensor, and tighten them to a maximum torque of 1.0 N•m. The outer diameter of screw heads and washers must be 6 mm or less. Check that the Sensor is securely fastened by the screws.
(4) Seal the sealing part of the inlet port with an O-ring.
The recommended O-ring is JIS B 2401, nominal number P4.

● Operating Environment

Do not use the Sensor in the following locations:
•Locations directly subject to heat radiated from heating equipment
•Locations subject to water or oil
•Locations subject to direct sunlight
•Locations subject to intense temperature changes
•Locations subject to icing or condensation
•Locations subject to excessive vibration or shock

● Countermeasures against Noise

Noise may make it impossible to obtain correct measurements.
Consider the following countermeasures.
•Allow as much space as possible between the Sensor and devices that generates high frequencies (such as high-frequency welders and high-frequency sewing machines) or surges.
•Attach surge absorbers or noise filters to noise-generating devices that are near the Sensor (in particular, equipment with inductance, such as motors, transformers, solenoids, and magnetic coils).
(It also helps to separate pipes and ducts, and to use shielded cables.)

● Power Supply

•Force of connector terminal is 20 N max. Do not add strength more than tension of wire bending to connector at wiring. Install the connector coaxially to the fitting axis with holding all wires. And pulling angle should be within 15 degrees.
•Use the applicable connectors. Directly soldering the connection terminals will cause product failure. (except for the D6F-PH)
•Check the terminal names and polarity and wire the power supply correctly. Incorrect wiring will cause failure of internal components.
•When using a commercially available switching regulator, ground
the FG (frame ground) and G (ground) terminals.

● Handling

The sensor is a precision device, and if large shock and load is applied, it may cause a failure or characteristic change. Do not drop it, disassemble it, or apply force to the terminals more than necessary. And please do not use dropped product.
•The sensor shall only be handled in electrostatic discharge protected areas (EPA) under protected and controlled conditions

RoHS Directive

The RoHS mark is displayed on the packing of products for which the six substances banned by the RoHS Directive have been abolished (both in processing and in the electronic components mounted to the PCBs).
* RoHS marking may be terminated if it is later determined that parts that were previously treated as RoHS compliant are not compliant due to circumstances at the supplier of the parts.

● RoHS Compliance Criteria

The following standards are used to determine RoHS compliance for the six banned substances.
(Items to which the RoHS Directive is not applicable are not given.)
•Lead: 1,000 ppm max.
•Hexavalent chromium: 1,000 ppm max.
•Mercury: 1,000 ppm max.
•PBB: 1,000 ppm max.
•Cadmium: 100 ppm max.
•PBDE: 1,000 ppm max.