Product Details Portlet

D6F-A3 MEMS Flow Sensor

High-accuracy Sensing with a Thin, Compact Body.

  • A thin, lightweight flow sensor.
  • Unique flow path structure provides high precision and fast response.
RoHS Compliant
Note: This web page provides an excerpt from a datasheet. Refer to Product Datasheet and other applicable documents for more information.
MEMS Flow Sensor
Applicable fluid
Flow rate range
Air0 to 3 L/minD6F-03A3-000

Accessory(Sold separately)
Note:Refer to Accessories for the D6F Series on page 39.
Flow Range (See note 1.)0 to 3 L/min
Calibration Gas (See note 2.)Air
Flow Port TypeM5 thread
Electrical ConnectionThree-pin connector
Power Supply10.8 to 26.4 VDC
Current Consumption15 mA max. with no load, with a Vcc of 12 to 24 VDC, and at 25°C
Output Voltage1 to 5 VDC (non-linear output, load resistance of 10 kΩ)
Accuracy±5% FS (25°C characteristic)
Repeatability (See note 3.)±0.7% FS
Output Voltage (Max.)5.7 VDC (Load resistance: 10 kΩ)
Output Voltage (Min.)0 VDC (Load resistance: 10 kΩ)
Rated Power Supply Voltage26.4 VDC
Rated Output Voltage6 VDC
Degree of ProtectionIEC IP40 (Excluding tubing sections.)
Withstand Pressure200 kPa
Pressure Drop (See note 3.)0.45 kPa
Operating Temperature (See note 4.)0 to 50°C
Operating Humidity (See note 4.)35% to 85%
Storage Temperature (See note 4.)−10 to 60°C
Storage Humidity (See note 4.)35% to 85%
Temperature Characteristics±5% FS for 25°C characteristic at an ambient temperature of 0 to 50°C
Insulation ResistanceBetween Sensor outer cover and lead terminals: 20 MΩ min. (at 500 VDC)
Dielectric StrengthBetween Sensor outer cover and lead terminals: 500 VAC, 50/60 Hz min. for 1 min (leakage current: 1 mA max.)
Weight5.3 g
Note: 1. Volumetric flow rate at 0°C, 101.3 kPa.
Note: 2. Dry gas. (must not contain large particles, e.g., dust, oil, or mist.)
Note: 3. Reference (typical)
Note: 4. With no condensation or icing.


Pin No. 1:GND


ConnectorSM03B-SRSS-TB (Made by J.S.T. Mfg. Co.)
Use the following connectors made by J.S.T. Mfg. Co. for connections to the Sensor:
• Pressure-welded Connector
Socket: 03SR-3S
Wires: AWG30
• Crimp Connector
Contacts: SSH-003T-P0.2
Housing: SHR-03V-S or SHR-03V-S-B
Wires: AWG32 to AWG28

(Unit :mm)

MEMS Flow Sensors

Mounting Hole Dimensions

Precautions for Correct Use

Sensor Applications

The D6F is built for use with general-purpose devices. In particular, when using the D6F for applications with the safety requirements described below, take steps to ensure system and device safety through measures such as fail-safe designs, redundant designs, and regular inspections.
•Safety devices for ensuring safety for persons
•Transportation equipment control (such as applications to stop operation)
•Aviation and space equipment
•Nuclear power equipment
Do not use the D6F for applications in which D6F operation would directly affect human life.

Fluids, Pipe Mounting and Sensor Installation

All D6F Models
(1) Use clean fluids. Install a filter or mist separator on the inflow pipe. Failure to do so may result in malfunction or changes in characteristics due to dust or mist. This does not apply to the D6F-W, D6F-V, D6F-P and D6F-PH.
(2) Do not use corrosive gases other than the specified applicable fluids (such as chlorine, sulfur, acid,or alkali) . Doing so may cause product failure.
(3) The specified performance may not be obtained if the D6F is used for fluids other than the specified applicable fluids.
(4) After removing the Sensor from the package, do not allow foreign particles to enter the piping. Foreign particles in the piping may cause product failure.
(5) Install the Sensor so that the fluid flows in the direction indicated by the arrow on the Sensor. Correct measurements cannot be obtained if the fluid flows in the wrong direction. This does not apply to the D6F-V, D6F-P and D6F-PH.
(6) It is recommended that the Sensor (except for the D6F-A3) be mounted horizontally. If it is not mounted horizontally, an error of ±1% FS or higher may result.
(7) Install the Sensor on a flat surface. Incorrect installation may damage the Sensor and make it impossible to obtain correct measurements.
(8) Make sure that the power to all equipment is turned OFF before you install the Sensor. Installing the Sensor while the power supply is ON may result in electrical shock or abnormal operation.
(9) Always check operation after installation.
(10) Do not drop the Sensor or disassemble the cover.

(1) When installing the pipes, use M5 screws for the joints and tighten to a torque of 1.5 N•m maximum. Use sealing tape to make the joints airtight. Incorrect installation may make it impossible to obtain correct measurements.
(2) It is recommended that the Sensor be mounted either horizontally or vertically. Mounting the Sensor at an angle may make it impossible to obtain correct measurements.
(3) Use M3 panhead screws to install the Sensor, and tighten them to a maximum torque of 0.59 N•m.

Operating Environment

Do not use the Sensor in the following locations:
•Locations directly subject to heat radiated from heating equipment
•Locations subject to water or oil
•Locations subject to direct sunlight
•Locations subject to intense temperature changes
•Locations subject to icing or condensation
•Locations subject to excessive vibration or shock

Countermeasures against Noise

Noise may make it impossible to obtain correct measurements.
Consider the following countermeasures.
•Allow as much space as possible between the Sensor and devices that generates high frequencies (such as high-frequency welders and high-frequency sewing machines) or surges.
•Attach surge absorbers or noise filters to noise-generating devices that are near the Sensor (in particular, equipment with inductance, such as motors, transformers, solenoids, and magnetic coils).
(It also helps to separate pipes and ducts, and to use shielded cables.)

Power Supply

•Force of connector terminal is 20 N max. Do not add strength more than tension of wire bending to connector at wiring. Install the connector coaxially to the fitting axis with holding all wires. And pulling angle should be within 15 degrees.
•Use the applicable connectors. Directly soldering the connection terminals will cause product failure. (except for the D6F-PH)
•Check the terminal names and polarity and wire the power supply correctly. Incorrect wiring will cause failure of internal components.
•When using a commercially available switching regulator, ground
the FG (frame ground) and G (ground) terminals.


The sensor is a precision device, and if large shock and load is applied, it may cause a failure or characteristic change. Please do not use the sensor which is added excessive shock to the terminals, discompose the cover, or has fallen.
•The sensor shall only be handled in electrostatic discharge protected areas (EPA) under protected and controlled conditions

RoHS Directive

The RoHS mark is displayed on the packing of products for which the six substances banned by the RoHS Directive have been abolished (both in processing and in the electronic components mounted to the PCBs).
* RoHS marking may be terminated if it is later determined that parts that were previously treated as RoHS compliant are not compliant due to circumstances at the supplier of the parts.

RoHS Compliance Criteria

The following standards are used to determine RoHS compliance for the six banned substances.
(Items to which the RoHS Directive is not applicable are not given.)
•Lead: 1,000 ppm max.
•Hexavalent chromium: 1,000 ppm max.
•Mercury: 1,000 ppm max.
•PBB: 1,000 ppm max.
•Cadmium: 100 ppm max.
•PBDE: 1,000 ppm max.