MEMS Core Technologies

foundation technology

Expertise proven by experience and achievement over two decades of history

The development of our MEMS products continuing since the 1990s has supported the technologies to build quality and reliability into your products.

  • MEMS history
  • Capacitive sensing
  • Thin-film sensor implementation
  • Electrostatic actuation
  • 8-inch MEMS processing
  • Vertical MEMS integration